Molflow for sputtering simulations
07.10.2020 - CERN
Using Molflow to test various cathode configuration to measure/optimize deposited film thickness.
First part: using Molflow's built-in tools to test cathode configurations in an elliptic chamber
Second part: importing a real RF cavity model and extracting/post-processing resulting profile
Printout:
molflow_for_sputtering.pdf
Introduction (presentation):
molflow_intro.pptx
Files you need for RF cavity part:
20201007_seminar_input.zip
Solved ellipse cavity:
3_ellipse_solved.zip
ellipse_thickness.xlsx
Solved RF cavity:
rfcavity_equalized.zip
impingement_results.xlsx
Last update:
November 14, 2024